Miniaturized Shear Elements


  • Microscope drives
  • MEMS stimulation
  • Excitation of surface waves

Customized Versions on Request

  • Variety of electrode designs, e.g. with and without pole identification
  • Contacting, e.g. with connection wires


Piezoceramic Mini Shear Elements
MaterialPIC151, PIC255, PIC181
L [mm]> 2
W [mm]> 1
TH [mm]> 0.2 (20 µm tolerance is possible)
Electrode materialsPVD thin layer: CuNi, Au, etc.

L       Length
W      Width
TH     Thickness
P       Polarization direction