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Low-Profile PILine® M-665 piezo linear motor stage with integrated linear encoder.
Low-Profile PILine® M-665 piezo linear motor stage with integrated linear encoder.

M-665 vacuum version
M-665 vacuum version, to 10-8 hPa.

M-665 with C-865 controller/driver.
M-665 with C-865 controller/driver.

M-665 dimensions in mm; decimal places separated by commas.
M-665 dimensions in mm; decimal places separated by commas.

PILine® Piezo linear motor stage performing 1 µm steps. Piezomotors are self-locking. After a stable position is reached, there is no servo dither as common with other linear motors.
PILine® Piezo linear motor stage performing 1 µm steps. Piezomotors are self-locking. After a stable position is reached, there is no servo dither as common with other linear motors.

M-665 PILine® Low-Profile Translation Stages with Ultrasonic Piezo Linear Motors 

This product has been replaced by the new M-682 stage
  • Piezo-Motor-Driven Translation Stage
  • Low-Profile, only 26.5 mm
  • Velocity to 400 mm/s
  • Acceleration to 20 g
  • 0.1 µm Linear Encoder (Direct-Motion Metrology)
  • 50 mm Travel
  • AutoLock Feature
  • XY CombinationsAvailable
  • 20,000 h MTBF
  • Vacuum Versions to 10-8 hPa Available
PILine® – Ultimate Motion in the Smallest Package

PILine® M-665 micropositioning systems are low-profile, high-accuracy piezo-motor-driven translation stages with linear encoders and high-precision guidings.

Working Principle

M-665 stages have a new, patented, ultrasonic drive developed by PI. The highly compact, integrated P-665 piezomotor drive can provide accelerations of up to 20 g and velocities of up to 400 mm/s, together with high resolution and holding force. Because the ceramic stator is pressed against a slider in the stage, piezomotors resist motion with an intrinsic holding force when the stage is at rest. The result is very high position stability without the heat dissipation common with conventional linear motors. Furthermore, there are no gears, leadscrews or other mechanical components to contribute play or backlash.

Direct-Motion Metrology with 0.1 µm Resolution

M-665 stages are equipped with high-resolution direct-measuring optical linear encoders. Two different models are available: The M-665.265 for operation with PI"s C-865 controller (see page see page) and the M-665.285 for operation with conventional servo-controllers.

M-665.265 with C-865.165: Optimized for High Velocity and Fast Settling

The M-665.265 is designed for operation with the C-865.161 Piezomotor Controller. That specialized controller achieves speeds of up to 400 mm/s with very short settling times, and has integrated drive electronics for the M-665.265.

M-665.285 with C-185.165: For Operation with Conventional Servo-Controllers

The M-665.285 is designed for operation with conventional servo-controllers. This requires the C-185.165 external drive electronics, which accepts a ±10 V analog signal from the controller for example controllers from different manufacturers such as GALIL, NI or DeltaTau, which also provide special options for piezo linear motors. Please request more information from the corresponding supplier. With non-PI controllers, the maximum closed-loop velocity depends on the design.

Accessories

For the operation of PILine® stages and piezo linear motors, a drive electronics is required. The driver is necessary to create the ultrasonic oscillations of the piezoceramic actuator of the motor. The choice of the drive electronics depends on the application and the motion controller used and is therefore not part of delivery of a PILine® stage or motor. The unit with the drive electronics, however, must be ordered at the same time as the stage, so that they can be tuned for optimum performance with each other.

Application Examples
  • Biotechnology
  • Micromanipulation
  • Microscopy
  • Quality Control
  • Semiconductor Test Equipment
  • Metrology
  • Mass Storage Testing
  • R&D
  • Photonics Packaging