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Miniature Translation Stages with Ultrasonic Piezo Linear Motors PIline™ M-661 M-662 M-663  

Technical Data

ModelsM-663.4PMM-663.4PRM-661.4P0M-662.4P0UnitsNotes
Travel range 20202020mm 
Design resolution0.11.0--µmA3
Min. incremental motion0.22.00.1)*0.1)*µmA4
Bidirectional repeatability± 0.3± 3.0--µm 
Max. velocity400)**330800800mm/sec 
Max. normal load capacity0.50.50.50.5kgB1
Max. push/pull force3333N B2
Max. holding force5555N  
Operating voltage (driver)12121212V 
Operating voltage (piezo)60606060V 
Operating current<200 <200<200<200mA 
Weight0.050.050.030.03kg  
Dimensions (LxWxH)35x35x1535x35x1525x20x828x28x8mm³ 
Body materialAlAlAlAl L
MTBF>20,000>20,000>20,000>20,000 L
Recommended controllerC-843 GALIL, NI***C-843--  

* Open-loop system
** 130 mm/s with C-843 controller. 400 mm/s with GALIL controllers, M-663K005 option required!
*** For using NI controllers, please request further info on the C-809 motion interfaces (see link). For using GAL