| Models | M-663.4PM | M-663.4PR | M-661.4P0 | M-662.4P0 | Units | Notes |
|---|---|---|---|---|---|---|
| Travel range | 20 | 20 | 20 | 20 | mm | |
| Design resolution | 0.1 | 1.0 | - | - | µm | A3 |
| Min. incremental motion | 0.2 | 2.0 | 0.1)* | 0.1)* | µm | A4 |
| Bidirectional repeatability | ± 0.3 | ± 3.0 | - | - | µm | |
| Max. velocity | 400)** | 330 | 800 | 800 | mm/sec | |
| Max. normal load capacity | 0.5 | 0.5 | 0.5 | 0.5 | kg | B1 |
| Max. push/pull force | 3 | 3 | 3 | 3 | N | B2 |
| Max. holding force | 5 | 5 | 5 | 5 | N | |
| Operating voltage (driver) | 12 | 12 | 12 | 12 | V | |
| Operating voltage (piezo) | 60 | 60 | 60 | 60 | V | |
| Operating current | <200 | <200 | <200 | <200 | mA | |
| Weight | 0.05 | 0.05 | 0.03 | 0.03 | kg | |
| Dimensions (LxWxH) | 35x35x15 | 35x35x15 | 25x20x8 | 28x28x8 | mm³ | |
| Body material | Al | Al | Al | Al | L | |
| MTBF | >20,000 | >20,000 | >20,000 | >20,000 | L | |
| Recommended controller | C-843 GALIL, NI*** | C-843 | - | - |
* Open-loop system
** 130 mm/s with C-843 controller. 400 mm/s with GALIL controllers, M-663K005 option required!
*** For using NI controllers, please request further info on the C-809 motion interfaces (see link). For using GAL