- For OEM Applications
- Ceramic Insulation
- Positioning Range up to 2 mm
- Fast Response (< 10 msec)
- Nanometer-Range Resolution
- Low Operating Voltage
- Vacuum-Compatible Versions
- Available with Integrated Position Sensor
- Special OEM and Bench-Top Amplifiers/Drivers Available
Application Examples
- Wire bonding
- Pneumatic valves
- Fiber optic switches
- Beam deflection
- Micropositioning
- Acceleration sensors
PICMATM-series multilayer bender piezo actuators provide a
deflection of up to 2 mm, forces up to 2 N (200 grams) and
response times in the millisecond range. These multilayer
piezoelectric components are manufactured from ceramic
layers of only about 25 µm thickness. They feature internal
silver-palladium electrodes and ceramic insulation applied in
a co-firing process. The bender have two outer active areas
and one central electrode network dividing the actuator in
two segments of equal capacitance, similar to a classical
parallel bimorph.
Advantages
PICMATM Bender piezo actuators offer several advantages
over classic bimorph components manufactured by gluing
together two ceramic plates (0.1 to 1 mm thick): faster
response time and higher stiffness. The main advantage,
however, is the drastically reduced (by a factor of 3 to 10)
operating voltage of 60 V only. The reduced voltage allows
smaller drive electronics and new applications, such as in
medical equipment. Additionally these devices offer an
improved humidity resistance due to the 100% ceramic
insulation.
Long Lifetime and High Performance-Ideal for
Dynamic Operation
PICMATM Bender actuators are superior to conventional
actuators in high-endurance situations. They show
substantially longer lifetimes both in static and dynamic
operation, even in harsh environments. The monolithic,
ceramic-insulated design makes polymer-film insulation
unnecessary. Diffusion of water molecules into the
insulation layer, the major cause of dielectric breakdown,
is greatly reduced by the use of cofired, outer ceramic
insulation.
The high Curie temperature of 320 °C gives PICMATM
actuators a usable temperature range extending up to
150 °C, well above the 80 °C limit of conventional multilayer
actuators. At the low end, operation down to a few kelvin is
possible (with some reduction in performance specifications).
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Bender actuators with optional wire
leads (order number extension .x1);
microprocessor for size comparison.
Recommended clamp: non-conducting
material with rounded edges at
clamping interface (for ceramic
protection). Not included. See table for
dimensions L, W and T.
Custom closed-loop bender actuator with strain
gauge sensor applied for position measurement.
Full differential voltage control.
Pin assignment: 1: -30 V [or GND];
2: -30 V to +30 V [or 0 to 60 V];
3: +30 V [or +60 V]
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Optimum UHV Compatibility-Minimal Outgassing
The lack of polymer insulation and the high Curie temperature make for optimal ultra-high-vacuum compatibility (no measurable outgassing / high bakeout temperatures, up to 150 °C).
Amplifiers, Drivers & Controllers
PI offers a wide range of standard amplifiers and controllers for piezo actuators (see page 28 and www.pi.ws). The E-650.00 and E-650.OE drivers were specifically designed to operate PICMA™ Bender actuators. For closed-loop positioning applications, a variety of analog and digital controllers are available.
Of course, PI also designs custom amplifiers and controllers.
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