Piezo Actuators Improve Vibration Isolation for Lithography and MicroscopyAmbient ground motion, power supply units, cooling systems – vibrations originate all around and are transmitted via the ground or the air. They become a problem when they affect high-precision manufacturing or measuring processes on a nanometer scale.Further information: Vibration isolation for industry, laboratory and research back to overview |
Vacuum coating (Sputtering) of piezo ceramics by PI Ceramic
Active piezoelectric vibration isolation system, isolators and controller: STACIS® from TMC
